Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-3424 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-3241 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-124 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L79-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-124 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L65-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L65-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L79-02 |
filingDate |
2014-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2019-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2019-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-102004697-B1 |
titleOfInvention |
Composition for forming resist underlayer film |
abstract |
[PROBLEMS] To provide a composition for forming a new resist lower layer film. [MEANS FOR SOLVING PROBLEMS] The following formula (1) [Chemical Formula 1] (Wherein X 1 represents a divalent organic group having 6 to 20 carbon atoms and at least one aromatic ring which may be substituted with a halogen group, a nitro group, an amino group or a hydroxy group, X 2 represents a halogen group, An organic group having 6 to 20 carbon atoms and at least one aromatic ring which may be substituted with a nitro group, an amino group or a hydroxy group, or a methoxy group. And a solvent having a structural unit represented by the following formula (I). |
priorityDate |
2013-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |