http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102001911-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102001911-B1 |
| titleOfInvention | Vertical metal organic chemical vapor deposition apparatus for solar cell |
| abstract | The vertical metal-organic chemical vapor deposition apparatus for a solar cell according to the present embodiment includes: a chamber having an inner space; A deposition unit positioned in the inner space to perform deposition; And a plurality of exhaust lines connected to the inside of the chamber and discharging the process gas inside the chamber to the outside. The deposition unit may include: a susceptor in which a substrate to be deposited inside the chamber is inclined or vertically mounted to a bottom surface; And a showerhead for supplying reactive gases necessary for deposition to the substrate. A discharge amount of the exhaust line located above the chamber among the plurality of exhaust lines is smaller than an exhaust amount of the exhaust line located below the chamber among the plurality of exhaust lines. |
| priorityDate | 2015-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.