http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102000774-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2437 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-326 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036 |
filingDate | 2012-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2019-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102000774-B1 |
titleOfInvention | Measurement method using a sensor; sensor system and sensor |
abstract | A method for measuring a change in environment in a sensor is provided. The sensor comprising: a first layer formed of a piezoelectric material; A second layer adjacent the first layer and configured to be acoustically coupled to the first layer; And electrodes that are disposed to generate bulk acoustic waves by applying a driving signal to the first layer. The frequency temperature coefficient of the first layer is different from the frequency temperature coefficient of the second layer. In the method, a first layer resonance frequency associated with the first layer and a combination resonance frequency associated with a combination of the first layer and the second layer are detected. A shift in one or both of the first layer resonance frequency and the combination resonance frequency is detected. A portion of the deviation, caused by a temperature change in the sensor, is identified. Other parts of the deviation caused by environmental changes in the sensor other than the temperature changes are identified. Corresponding sensors and sensor systems are also provided which are operable to carry out the method. |
priorityDate | 2011-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.