http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101996088-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101996088-B1 |
| titleOfInvention | Photoresist composition, process for forming resist pattern and acid generator |
| abstract | An object of the present invention is to provide a photoresist composition capable of suppressing the occurrence of development defects. The present invention also relates to a photoresist composition containing an acid generator comprising a polymer having a structural unit (I) comprising an acid dissociable group [A] and a compound represented by the following formula (1). In the formula (1), R 1 is a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms. The aliphatic heterocyclic ring may be conjugated to the carbon ring of the alicyclic hydrocarbon group. X is ** - (X 2 -R ') n -X 1 -. X 1 is * -COO- or -O-. X 2 is -COO- or -O-. R 'is a divalent alicyclic hydrocarbon group having 3 to 20 carbon atoms. The aliphatic heterocyclic ring may be conjugated to the carbon ring of the alicyclic hydrocarbon group. n is 0 or 1; R 2 is a divalent straight-chain hydrocarbon group having an even number of carbon atoms or a divalent straight-chain fluorinated hydrocarbon group having an even number of carbon atoms. R 3 is a hydrogen atom or a fluorine atom. |
| priorityDate | 2011-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 372.