| abstract |
The nano-pore device according to an embodiment of the present invention uses a very cheap and easily obtainable flexible dielectric film such as thin glass or polymer. The micropores of the flexible dielectric film can be formed using a pulsed laser. Accordingly, the nano-pore element has flexibility and can not easily be broken. In addition, the flexible nano-pore device is advantageous in that it is very inexpensive and can be mass-produced in terms of materials used. In particular, in the case of a conventional rigid substrate, it is very difficult to deal with it because it is very fragile in addition to complicated processes and costs. Further, in the mounting process for sealing, the rigid substrate can easily be broken. |