http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101985883-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02263 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2016-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101985883-B1 |
| titleOfInvention | Container for chemical precursors in a deposition process |
| abstract | Described herein are systems and methods for using the same for the storage and delivery of chemical precursors used in the fabrication of semiconductor devices. In one aspect, the storage system comprises a chemical precursor and a vessel, and the system has an inlet injection design. The chemical precursor has a low vapor pressure of less than about 50 Torr-absolute at the vessel temperature set for delivery. The delivery system additionally contains a carrier gas. The inlet injection design can deliver the carrier gas at a specific pressure and at a particular low rate to impinge on the surface of the chemical precursor to form a vapor or dot of the chemical precursor. Thereafter, the vapor or droplets of the chemical precursor travel to the processing tool and combine with the carrier gas to provide a fluid stream full of precursors used in the processing tool. |
| priorityDate | 2015-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 79.