| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2443
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54 |
| filingDate |
2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2019-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101981752-B1 |
| titleOfInvention |
Diffusion barriers for oscillation corrections, measurement assemblies for measuring deposition rates and methods therefor |
| abstract |
Is a detection element for a measurement assembly adapted to measure the rate of deposition of evaporated material on a substrate. The detection element includes: an oscillation correction for detecting a deposition rate; And a barrier layer comprising a barrier material covering at least a portion of the oscillation crystal, the barrier layer being configured to prevent the vaporized material from diffusing into the oscillation crystal. |
| priorityDate |
2015-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |