http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101976856-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate | 2013-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101976856-B1 |
| titleOfInvention | Manufacturing method of an array substrate for liquid crystal display |
| abstract | The present invention relates to a method of manufacturing a semiconductor device, comprising: laminating a pure amorphous silicon (a-Si: H) thin film on a substrate and sequentially laminating an amorphous silicon (n + a-Si: H) Forming a mask pattern in which an etching region is opened on the amorphous silicon (n + a-Si: H) thin film containing the impurity; And A method for manufacturing an array substrate for a liquid crystal display device, comprising: a step of collectively etching a thin amorphous silicon (a-Si: H) thin film and an amorphous silicon (n + a-Si: H) In the method, The etching liquid composition, (A) and sulfate from 5.0 to 15% by weight relative to the total composition weight, (B) Fe 3 + compound 1.0 to 20.0% by weight, (C) also 0.01 to 10.0% by weight of a fluorine compound, (D) mineral acid (E) 0.01 to 10.0% by weight of an etching rate improver, and (F) a residual amount of water. The present invention also relates to a method for producing an array substrate for a liquid crystal display. |
| priorityDate | 2013-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.