http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101976212-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-465 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate | 2012-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101976212-B1 |
| titleOfInvention | Semiconductor device and method for manufacturing the same |
| abstract | The present invention provides a highly reliable semiconductor device and a method of manufacturing the semiconductor device. A semiconductor device is manufactured with good yield to achieve a hard oxidation. A source electrode layer and a drain electrode layer are formed by an etching process in a semiconductor device having a gate electrode layer, a gate insulating film, an oxide semiconductor film sequentially laminated, and a transistor having a source electrode layer and a drain electrode layer formed in contact with the oxide semiconductor film, And a step of removing impurities due to the etching process existing in the vicinity of the surface. |
| priorityDate | 2011-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 70.