http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101972612-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 2014-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101972612-B1 |
| titleOfInvention | Photosensitive resin composition for interlayer insulation film |
| abstract | It is providing the photosensitive resin composition which can form the low dielectric constant interlayer insulation film by low temperature baking. As a photosensitive resin composition for interlayer insulation films containing alkali-soluble resin (A), the photosensitive agent (B), and the organic solvent (C), the said structural unit (A1) which said alkali-soluble resin (A) represents with the following general formula (a-1) ), And the copolymer which has a structural unit (A2) represented by the following general formula (a-2), and an alicyclic epoxy group containing unit (A3) in a structure. In said general formula, R < 0> and R < 1> represents a hydrogen atom or a methyl group, and Ra represents the organic group which has a hydrogen atom or a hydroxyl group. In addition, Rb represents a hydrocarbon group. |
| priorityDate | 2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 330.