http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101970850-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-087 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J8-00 |
filingDate | 2012-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2019-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101970850-B1 |
titleOfInvention | Apparatus and method for the condensed phase production of trisilylamine |
abstract | The present invention relates to a condensation phase batch process for the synthesis of trisilylamine (TSA). An improved synthesis method is described which aids in promoting the condensation phase reaction between the ammonia gas (or liquid) and the liquefied monochlorosilane (MCS), including the solvent, in good yield. This method facilitates the removal of by-product wastes, with little or no reactor downtime, a significant reduction in downstream solid contamination and high purity products from one-pass distillation. |
priorityDate | 2011-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.