| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42384
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78606
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78693
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2012-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2019-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101969867-B1 |
| titleOfInvention |
Semiconductor device and method for manufacturing the same |
| abstract |
The present invention provides a highly reliable semiconductor device and a method of manufacturing the semiconductor device. A semiconductor device is produced with good yield to achieve a hard oxidation. In a semiconductor device having a transistor in which a source electrode layer and a drain electrode layer are formed on an oxide semiconductor film so as to suppress impurities from entering into the side end portions of the oxide semiconductor film and generation of oxygen defects. As a result, a parasitic channel is formed at the side end portion of the oxide semiconductor film, and the electrical characteristics of the transistor are prevented from fluctuating. |
| priorityDate |
2011-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |