Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68327 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-201 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-43 |
filingDate |
2014-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-101968780-B1 |
titleOfInvention |
Cleaning method of substrate |
abstract |
An object of the present invention is to provide a cleaning composition for a substrate used for cleaning a substrate surface having a water contact angle of 100 degrees or more contaminated by a silicone component. The detergent composition of the substrate is a detergent composition used for cleaning the surface of a substrate, (A) Quaternary ammonium salt: 0.1 to 2.0 mass% (B) Water: 0.1 to 4.0 mass% (C) Organic solvent: 94.0 to 99.8 mass% And the like. |
priorityDate |
2013-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |