http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101968224-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04 |
| filingDate | 2015-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101968224-B1 |
| titleOfInvention | Method for manufacturing silica layer, silica layer, and electronic device |
| abstract | Applying a liquid material for pre-wetting comprising one or more carbon compounds represented by formula (1) on a substrate, applying a composition for forming a silica film on a substrate coated with liquid material for prewetting , And curing the substrate coated with the composition for forming a silica film. Formula 1 is as described in the specification. |
| priorityDate | 2015-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 107.