http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101956925-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2012-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101956925-B1 |
| titleOfInvention | Composition for forming resist lower layer film, resist lower layer film and method for forming the same, and method for forming pattern |
| abstract | It is an object of the present invention to provide a resist underlayer film which can form a resist underlayer film having a high heat resistance while maintaining high refractive index and damping coefficient characteristics required for a resist underlayer film, A composition for forming a resist lower layer film, a resist lower layer film, a forming method thereof, and a pattern forming method. The solving means of the present invention is a composition for forming a resist lower layer film, which comprises [A] a polymer having a structural unit (I) represented by the following formula (1). In the formula (1), Ar 1 and Ar 2 are each independently a divalent group represented by the following formula (2). In the following formula (2), R 1 and R 2 are each independently a divalent aromatic group. R 3 is a single bond, -O-, -CO-, -SO- or -SO 2 -. a is an integer of 0 to 3; Provided that when a is 2 or more, plural R 2 and R 3 may be the same or different. |
| priorityDate | 2011-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 210.