http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101948416-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N9-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N9-02 |
| filingDate | 2017-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101948416-B1 |
| titleOfInvention | Device for measuring density of film layer and method for measuring density of film layer using same |
| abstract | Preparing a substrate having a recessed region, providing dry particles to the recessed region of the substrate to produce a base film filling the recessed region, Removing a dummy portion of the base film formed in the recessed region to leave a target portion of the base film within the recessed region and measuring the mass of the recessed region and the mass of the target portion, A method of measuring the density of the film can be provided. |
| priorityDate | 2017-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 13.