http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101945083-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3286 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9646 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-547 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-453 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-082 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-453 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-547 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64 |
| filingDate | 2016-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101945083-B1 |
| titleOfInvention | Sintered body, sputtering target comprising sintered body and thin film formed by using spattering target |
| abstract | A sintered body or film containing ZnS and an oxide, wherein the sintered body contains ZnS in an amount of 40 to 70 mol%, the oxide in the sintered body contains at least a composite oxide of Zn, Ga and O, and the composition of the sintered body or film is 4 at% ≤ Ga / (Ga + Zn - S) ≤ 18 at%. An object of the present invention is to provide a sputtering target having a low bulk resistance value and capable of stable DC sputtering. It is another object of the present invention to provide a thin film having excellent properties in terms of optical properties and high temperature and high humidity resistance as a transparent conductive film for various displays, a protective film for an optical disk, and a film for optical adjustment. |
| priorityDate | 2015-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.