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filingDate 2016-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2019-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2019-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101941830-B1
titleOfInvention Method for coating a substrate with particles and apparatus for carrying out the method
abstract The present invention relates to a method of coating a substrate with particles, in which the following method steps are carried out in vacuum: the substrate of the substrate (7) to be coated in vacuum in the direction of the region in which the solid particles Positioning the surface; And the force generated by the electrostatic charge causes the solid particles to accelerate toward the substrate surface of the substrate 7 in order to separate the solid particles from one another and to coat the substrate surface with at least a portion of the separated solid particles, Introducing electrons into the solid particles for electrostatic charging. An apparatus that can be used for this purpose has a particle vessel, a substrate holder and an electron source.
priorityDate 2015-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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