| abstract |
A container for delivering a precursor-containing fluid stream from a contained precursor material, the container comprising: an inner space defined by an upper portion, at least one side wall, and a base portion; And one or more fluid outlets for the vaporized precursor, and one or more particle barriers defining at least one particle confined space within the inner space and comprising one or more three-dimensional filters. Also disclosed herein is a method of using an apparatus. |