http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101940162-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2012-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101940162-B1 |
| titleOfInvention | Systems and methods for buffer gas flow stabilization in a laser produced plasma light source |
| abstract | An extreme ultraviolet (EUV) light source is disclosed that includes an optical member, a target material, and a laser beam that passes through the optical member along a beam path to irradiate the target material. The EUV light source further includes a system for generating a gas flow directed toward the target material along the beam path, the system comprising a tapering member surrounding the volume and a plurality of gas lines, The gas line outputs the gas stream in this volume. |
| priorityDate | 2011-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.