http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101938022-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate | 2012-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101938022-B1 |
| titleOfInvention | Novel etching composition |
| abstract | The present invention relates to an etching composition comprising at least one compound containing at least one sulfonic acid, chloride or bromide halide anion, at least one nitrate or nitrosyl ion containing compound, and water. The at least one sulfonic acid may be from about 25% to about 95% by weight of the composition. The halide anion can be chloride or bromide, and can be from about 0.01% to about 0.5% by weight of the composition. The nitrate or nitrosyl ion may be from about 0.1% to about 20% by weight of the composition. Water may be at least about 3% by weight of the composition. |
| priorityDate | 2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 367.