http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101937155-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2012-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101937155-B1 |
| titleOfInvention | Coating compositions for use with an overcoated photoresist |
| abstract | The present invention relates to an organic coating composition, particularly an antireflective coating composition, comprising a component comprising at least one p-valent acid moiety, wherein the composition is characterized in that the exposure radiation is reflected from the substrate to an overcoated photoresist layer And / or is useful for functioning as a planarized, conformal or via-fill layer. |
| priorityDate | 2010-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 118.