| abstract |
To a ventilation gas management system and process for an enclosure that includes a fluid supply container (s) and through which ventilation gas is perfused to provide safe operation upon occurrence of fluid leakage from the container. The ventilation gas flow may be adjusted to accommodate various levels of risk associated with the placement and operation of such enclosures, including fluid supply container (s), such as gas boxes or gas cabinets, in semiconductor manufacturing facilities, The required ventilation gas requirements can be reduced. |