| abstract |
The salt represented by the formula (I-CC): - wherein Q 1 and Q 2 each independently represent a fluorine atom or the like, X 1 represents a single bond or the like, Y 1 represents a C 1 -C 36 aliphatic hydrocarbon group or the like, A 1 and A 2 each independently represent a C 1 -C 20 aliphatic hydrocarbon group or the like, Ar 1 represents (m 4 +1) - which may have one or more substituents, is a C6-C20 aromatic hydrocarbon group, B 1 represents a single bond or the like, B 2 represents a group which can be removed by the action of an acid, m 1 and m 2 independently represent an integer of 0 to 2, m 3 represents an integer of 1 to 3 on condition that m 1 + m 2 + m 3 = 3, and m 4 represents an integer of 1 to 3 -, and A photoresist composition comprising a salt represented by the formula (I-CC) and a resin having an acid-labile group and being insoluble or hardly soluble in an aqueous alkali solution but soluble in an alkali aqueous solution by the action of an acid. |