http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101919750-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate | 2011-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101919750-B1 |
| titleOfInvention | Aqueous polishing composition and process for chemically mechanically polishing substrates containing silicon oxide dielectric and polysilicon films |
| abstract | The present invention is directed to an aqueous polishing composition comprising: (A) abrasive cerium oxide particles; And (B) an amphipathic nonionic surfactant selected from water-soluble and water-dispersible, linear and branched polyoxyalkylene block copolymers of formula (I) R [(B1) m / ( B2) n Y] p (I), Wherein the exponents and variables have the following meanings: m, n and p are integers of 1 or more; R is a monovalent or polyvalent organic residue other than a C 5 -C 20 alkyl group or a hydrogen atom; (B1) is a block of oxyethylene monomer units; (B2) is a substituted oxyalkylene group in which the substituent is selected from two methyl groups, alkyl groups with more than two carbon atoms and cycloalkyl, aryl, alkyl-cycloalkyl, alkyl-aryl, cycloalkyl-aryl and alkyl- A block of monomeric units; Y is a monovalent organic residue other than a C 5 -C 20 alkyl group or a hydrogen atom; However, when (B) contains more than one block (B1) or (B2), two blocks of the same type are separated by different types of blocks. |
| priorityDate | 2010-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 159.