http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101918565-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76841 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2012-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101918565-B1 |
| titleOfInvention | Deposition of metal films using alane-based precursors |
| abstract | The present invention provides methods for depositing pure metal and aluminum alloy films. Specific methods include contacting the substrate surface with first and second precursors, wherein the first precursor is selected from the group consisting of dimethyl aluminum hydride, an amine coordinated with an amine, and a compound having a structure represented by formula (I) or (II) , And the second precursor comprises a metal halide: Wherein R is a C1-C6 alkyl group. Other methods include sequentially exposing the substrate to the first and second precursors, wherein the first precursor comprises an aluminum precursor as described above and the second precursor is Ti (NR ' 2 ) 4 or Ta (NR ' 2 ) 5 wherein R' is a C1-C4 alkyl, alkenyl, alkynyl, keto or aldehyde group. |
| priorityDate | 2011-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 54.