| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2383-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2518-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-0427 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 |
| filingDate |
2016-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101910188-B1 |
| titleOfInvention |
Silazane reforming method using a UV pulse |
| abstract |
One embodiment of the present invention relates to a method of coating a surface of a substrate coated with a polysilazane, a step of pretreating the surface of the substrate coated with the polysilazane, and a step of irradiating the surface of the pretreated substrate with a pulse UV, To a silica. The present invention also provides a method for producing a silica film. |
| priorityDate |
2016-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |