http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101897372-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-1213 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02614 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02172 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-3262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51 |
| filingDate | 2014-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101897372-B1 |
| titleOfInvention | Method for producing metal oxide film, metal oxide film, thin-film transistor, display device, image sensor, and x-ray sensor |
| abstract | The present invention relates to a process for producing a metal oxide precursor film, comprising the steps of applying a solution containing a metal nitrate on a substrate, drying the coating film to form a metal oxide precursor film, and alternately repeating the process of calling the metal oxide precursor film to a metal oxide film N times ), and includes repeating, (n-1) the molar concentration of the metal solution-th (including the metal nitrates used in the step of forming the precursor film is a metal oxide 2≤n≤N) C n -1 (mol / L) (C n / C n - 1 ) when the metal mole concentration of the solution containing the metal nitrate salt used in the step of forming the metal oxide precursor film at the n-th time is C n And a metal oxide film produced by the method and a device including the same. |
| priorityDate | 2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 98.