http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101897273-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-388 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 2010-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101897273-B1 |
| titleOfInvention | Etchant composition and method |
| abstract | The present invention (A) high-strength potassium monopersulfate providing from about 0.025 wt% to about 0.8 wt% active oxygen; (B) from about 0.01% to about 30% by weight of the composition (B1) an organic acid, an alkali metal salt of an organic acid, an ammonium salt of an organic acid, or a homopolymer of an organic acid, or (B2) halogen salts or nitrates of phosphonium, tetrazolium, or benzenium, or (B3) a mixture of components (B1) and (B2); And (C) from greater than 0% to about 97.49% by weight of water An etchant composition comprising: And a method of etching a substrate using the composition. |
| priorityDate | 2009-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 124.