| abstract |
[Solution] An onium salt compound represented by the formula (1). [Z + is a sulfonium cation represented by the formula (a) or an iodonium cation represented by the formula (b). Represents a cyclic structure having 2 to 5 carbon atoms via a nitrogen atom. In the formula (1), the substituent group -L-CO 2 - (L is a single bond or a divalent hydrocarbon group) necessarily has one.] [Effect] The onium salt compound contained in the resist composition of the present invention can function as an acid diffusion control agent, resulting in a small MEF and LWR, excellent depth of focus, and high resolution pattern profile. |