| abstract |
An object of the present invention is to provide a ceramic heater in which a heater electrode is embedded in a ceramic base material, thereby further suppressing the in-plane variation of electrical resistivity while improving the inversion phenomenon of resistivity temperature dependency. The electrostatic chuck 10 includes a disc-shaped alumina ceramic base 12, heater electrodes 14 buried in the alumina ceramic base 12, and electrostatic electrodes 16. The upper surface of the alumina ceramic base 12 is a wafer placing surface 12a. The heater electrode 14 is patterned in such a manner as to be wired over the entire surface of the alumina ceramic base 12, for example, at one time. When the voltage is applied, the heater electrode 14 generates heat to heat the wafer W. The heater electrode 14 is made mainly of TiSi 2 . |