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filingDate 2017-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2018-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101885995-B1
titleOfInvention Monomer, polymer, resist composition, and patterning process
abstract An object of the present invention is to provide a photolithography method using a high energy beam such as ArF excimer laser beam, EB, EUV, etc., as a light source, An object of the present invention is to provide a monomer and the like which are used in a chemically amplified resist composition which is excellent in balance and is excellent in compatibility and in which defects are hardly expressed. [MEANS FOR SOLVING PROBLEMS] A monomer represented by the following formula (1).
priorityDate 2016-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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