http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101877979-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K7-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01D21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L5-00 |
| filingDate | 2016-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101877979-B1 |
| titleOfInvention | Sensor of cnt-metal hybrid structure and manufacturing method thereof |
| abstract | The present invention relates to a sensor including a carbon nanotube-metal fusion structure and a method of manufacturing the sensor, and a sensor according to an embodiment of the present invention includes a silicon (Si), a silicon oxide (SiO2), or a polydimethylsiloxane A carbon nanotube layer formed in contact with a part of the substrate on the substrate, the carbon nanotube layer including a plurality of semiconducting single wall carbon nanotubes, and a plurality of semiconductive single wall carbon nanotubes And a metal layer in contact with the nanotube. |
| priorityDate | 2015-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.