http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101871500-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2011-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101871500-B1 |
| titleOfInvention | Salt and photoresist composition |
| abstract | Formula (I): (I) (Wherein Q 1 and Q 2 each independently represent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms, L 1 represents a divalent saturated hydrocarbon group having 2 to 17 carbon atoms, and the divalent saturated hydrocarbon group -CH 2 - may be substituted with -O- or -CO-, R 1 and R 2 each independently represent a hydrocarbon group having 1 to 12 carbon atoms, and Z 1 + represents an organic counter ion) Lt; / RTI > |
| priorityDate | 2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 276.