http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101868730-B1

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filingDate 2015-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2018-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101868730-B1
titleOfInvention Semiconductor device and method of manufacturing the semiconductor device
abstract 1. A semiconductor device comprising: a semiconductor substrate having a trench formed on a surface thereof; a trench electrode disposed in the trench; an interlayer insulating film covering a surface of the trench electrode and protruding from the surface of the semiconductor substrate; A Schottky electrode disposed on the surface of the substrate and disposed at a position spaced apart from the interlayer insulating film and in Schottky contact with the semiconductor substrate and a Schottky electrode disposed within the recess between the interlayer insulating film and the Schottky electrode And a surface electrode covering the interlayer insulating film, the buried electrode, and the Schottky electrode. The buried electrode is made of a metal different from the Schottky electrode.
priorityDate 2014-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 38.