http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101849017-B1

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filingDate 2016-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bc6c49f031500e9d2a34a70b7b7a69b
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publicationDate 2018-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101849017-B1
titleOfInvention Manufacturing method of nano filter and fluidics element
abstract A method of manufacturing a fluid device including a nanofilter is disclosed. This includes a process of making using a filter mold having a probe-like protruding column. Here, the size of the filter hole can be determined by laminating the first polymer layer on the filter mold, by partially removing the first polymer layer, and by controlling the etching time, by adjusting the exposure length of the probe protruding columns. The resulting fluid device includes a monolayer filter structure, which allows fluids of relatively low pressure to flow smoothly.
priorityDate 2016-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 27.