Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_259697bb7506be6263dc8926165c2806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e0cefd36077e05d57ff9fca9250d762e |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-4088 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12M1-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12Q1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-14 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C12M1-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C12Q1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-14 |
filingDate |
2016-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bc6c49f031500e9d2a34a70b7b7a69b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_664e3b02321f12f61fdfc4d92f8229f1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e20311d7733b86b04d562a1908dbc55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4b0ef7d5e44bd8e7872181909057708 |
publicationDate |
2018-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-101849017-B1 |
titleOfInvention |
Manufacturing method of nano filter and fluidics element |
abstract |
A method of manufacturing a fluid device including a nanofilter is disclosed. This includes a process of making using a filter mold having a probe-like protruding column. Here, the size of the filter hole can be determined by laminating the first polymer layer on the filter mold, by partially removing the first polymer layer, and by controlling the etching time, by adjusting the exposure length of the probe protruding columns. The resulting fluid device includes a monolayer filter structure, which allows fluids of relatively low pressure to flow smoothly. |
priorityDate |
2016-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |