| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f6b149ea1849da2de91fd17cd1a239c5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-50 |
| filingDate |
2016-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_323faeb814b62b29c2b69a822962aff3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_464c29442d012577125dc590e60f7218 |
| publicationDate |
2018-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101845712-B1 |
| titleOfInvention |
Thin layers deposition apparatus |
| abstract |
A thin film deposition apparatus is disclosed. A thin film deposition apparatus according to the present invention includes: a source unit disposed inside a vacuum chamber in which a deposition process is performed on a substrate and discharging a deposition material to be deposited on the substrate; a substrate unit connected to the vacuum chamber, A substrate alignment unit connected to the vacuum chamber for selectively shielding and opening the substrate with respect to the source unit and transferring the thermal energy emitted from the source unit to the substrate alignment unit; And a shutter unit provided with a heat-shielding shutter module which is provided so as to be able to be cooled so as to shut off the shutter unit. |
| priorityDate |
2016-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |