http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101830780-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24942 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2011-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101830780-B1 |
| titleOfInvention | Method of preparing thin film, thin film, apparatus for manufacturing thin film and electronic device including the thin film |
| abstract | A thin film production method, thin film, thin film production apparatus and electronic device are disclosed. The disclosed method of manufacturing a thin film includes a step of applying a composition for forming a thin film to a substrate and a step of subjecting the applied thin film forming composition to a reduced pressure heat treatment. The disclosed thin film includes a dense layer having a thickness of greater than 50 ANGSTROM to 20000 ANGSTROM or less and a refractive index of 1.85 to 2.0. |
| priorityDate | 2011-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 517.