http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101827576-B1
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F26-06 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10 |
filingDate | 2011-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2018-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2018-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101827576-B1 |
titleOfInvention | Resin, resist composition and method for producing resist pattern |
abstract | The present invention provides a resin having a structural unit derived from a compound represented by the formula (I). [Wherein R 1 represents a C 1 to C 6 alkyl group, a hydrogen atom or a halogen atom which may have a halogen atom; A 1 represents a C 1 to C 6 alkanediyl group which may be substituted or a group represented by the following formula (a-1); The ring X 1 represents a C 2 to C 36 heterocyclic ring, and the hydrogen atom contained in the heterocyclic ring may be substituted with a halogen atom, a hydroxy group, a C 1 to C 24 hydrocarbon group, a C 1 to C 12 alkoxy group, A C 2 to C 4 acyl group or a C 2 to C 4 acyloxy group. (Wherein, s represents an integer of 0 to 2; A 10 and A 11 represents an aliphatic hydrocarbon group which may be substituted independently at each occurrence C 1 to C 5; A 12 is C 1 to an optionally substituted It represents an aliphatic hydrocarbon group or a single bond, a C 5; X 10 and X 11 are being independently represent an oxygen atom, a carbonyl group, a carbonyloxy group or oxycarbonyl group in each case; However, a 10, a 11, a 12, X < 10 > and X < 11 > is 12 or less) |
priorityDate | 2010-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 360.