http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101825095-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06761 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06755 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 |
| filingDate | 2016-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101825095-B1 |
| titleOfInvention | Probe pin coated with carbon layer for semiconductor test device and method of fabricating the same |
| abstract | The present invention relates to a probe pin for a semiconductor inspecting apparatus capable of increasing lifetime by increasing the material and releasability of a semiconductor element while having a high abrasion resistance, and an amorphous carbon film containing nitrogen in a surface portion capable of contacting a terminal of the semiconductor element A probe pin for a coated semiconductor inspection apparatus is provided. |
| priorityDate | 2016-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.