http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101821969-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F297-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0665 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F297-08 |
| filingDate | 2015-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101821969-B1 |
| titleOfInvention | Formation method of self-assembled nano-pattern using defect melting |
| abstract | The present invention provides a process for preparing a block copolymer comprising: a) mixing a block copolymer and a defect melt to produce a mixture; b) applying the mixture to a substrate to form a thin film; And c) annealing and self-assembling the thin film. The method includes forming a self-assembled nano-pattern using defect melting, wherein the defect has a χN of 10.5 or less. |
| priorityDate | 2015-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.