| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-194
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1606
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-16 |
| filingDate |
2016-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101820234-B1 |
| titleOfInvention |
Surface treatment method for deposition activation of dielectric thin film on graphene, surface treated graphene substrate by the same and electronic device comprising the surface treated graphene substrate |
| abstract |
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment method for activating a graphene dielectric thin film deposition, a graphene substrate surface-treated by the method, and a graphene substrate surface-treated, The surface treatment method for activating the phase dielectric thin film deposition includes: forming an organic material on the inactive graphene to perform a surface treatment; And forming a dielectric thin film on the organic material. |
| priorityDate |
2016-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |