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filingDate 2015-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101809498-B1
titleOfInvention Active light sensitive or radiation sensitive resin composition, active light sensitive or radiation sensitive film, mask blank provided with active light sensitive or radiation sensitive film, pattern forming method, method for manufacturing electronic device, electronic device and compound
abstract Sensitive active or radiation sensitive resin composition is a light sensitive active or radiation sensitive resin composition containing a crosslinking agent having a polarity converting group and an alkali-soluble resin, wherein the polarity converting agent is decomposed by the action of an alkaline aqueous solution , And a group which generates a carboxylic acid or a sulfonic acid on the side having a crosslinking group.
priorityDate 2014-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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