http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101802907-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C2322-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C35-12 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68792 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C19-546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C33-766 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16C35-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C33-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C35-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C19-54 |
| filingDate | 2014-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101802907-B1 |
| titleOfInvention | Rotation mechanism, machine tool, and semiconductor manufacturing device |
| abstract | The rotation mechanism includes a housing, a shaft, a bearing that rotatably supports the shaft, a projection provided at a first end of the shaft and radially outward of the first hole and protruding to the side of the housing, A first rotary member provided at a second end portion of the shaft and protruding to the outside in the radial direction of the second hole, A second gap between the first gap and the second gap, and a second gap formed between the first gap and the second gap, A first opening that supplies gas to the first rotary member, and a second opening that opens in a radially outward direction of the second hole of the housing and faces the second rotary member and extends along the circumferential direction of the second hole, And a second opening for supplying gas to the electrode. |
| priorityDate | 2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.