http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101798244-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D317-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D233-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D317-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D317-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D317-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D317-20 |
| filingDate | 2011-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101798244-B1 |
| titleOfInvention | Salt, photoresist composition and process for producing phororesist pattern |
| abstract | A salt represented by the formula (I). [In the formula (I) R 1 and R 2 each independently represent an alkyl group having 1 to 6 carbon atoms or R 1 and R 2 bond together to form an aliphatic ring having 5 to 20 carbon atoms together with the carbon atoms to which they are bonded. R 3 and R 4 independently represent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms. X 1 represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, the hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom, and -CH 2 - constituting the saturated hydrocarbon group may be replaced by -O- or -CO -. ≪ / RTI > Z 1 + represents an organic counter ion] |
| priorityDate | 2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 186.