http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101796318-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D211-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C229-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C229-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2010-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101796318-B1 |
| titleOfInvention | Radiation-sensitive resin composition and compound used therein |
| abstract | Disclosed is a radiation-sensitive resin composition which not only has excellent sensitivity, resolution, and exposure margin but also meets the MEEF performance, and a low molecular weight compound that is preferably used in the radiation-sensitive resin composition. (A) a nitrogen-containing compound having an acid-dissociable group having a specific structure, (B) an alkali-insoluble or alkali-insoluble resin protected with an acid-dissociable group and being alkali-soluble when the acid- ) A radiation-sensitive acid generator. |
| priorityDate | 2009-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 200.