http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101794951-B1
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
filingDate | 2010-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2017-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2017-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101794951-B1 |
titleOfInvention | Resist underlayer film-forming composition for lithography containing resin having aliphatic ring and aromatic ring |
abstract | [PROBLEMS] To provide a resist undercoat film having both heat resistance and etching resistance. A composition for forming a resist lower layer film for lithography, comprising a reaction product (C) of an alicyclic epoxy polymer (A) and a condensed cyclic aromatic carboxylic acid and a monocyclic aromatic carboxylic acid (B). Wherein the alicyclic epoxy polymer (A) has a repeating unit structure represented by the following formula (1): wherein T represents a repeating unit structure having an aliphatic ring in the main chain of the polymer and E represents an organic group having an epoxy group or an epoxy group . The condensed cyclic aromatic carboxylic acid (B1) and the monocyclic aromatic carboxylic acid (B2) are mixed at a molar ratio of B1: B2 = 3: 7 To 7: 3. Further, the condensed cyclic aromatic carboxylic acid (B1) is 9-anthracenecarboxylic acid, and the monocyclic aromatic carboxylic acid (B2) is benzoic acid. |
priorityDate | 2009-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 306.