| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2201-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2307-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0257
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2499-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R2400-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0176 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0018
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00158
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00373 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate |
2015-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101793329-B1 |
| titleOfInvention |
Micromechanical structure and method for fabricating the same |
| abstract |
The micromechanical structure includes a substrate and a functional structure arranged on the substrate. The functional structure has a functional area configured to deflect relative to the substrate in response to a force acting on the functional area. The functional structure includes a functional structure comprising a conductive base layer and a rigid structure arranged in the conductive base layer and having a rigid structure material that only partially covers the conductive base layer in the functional area. The rigid structure material includes a silicon material and at least a carbon material. |
| priorityDate |
2014-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |