| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R19-0092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-021 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2016-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2017-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101792935-B1 |
| titleOfInvention |
Heater abnormality detecting apparatus, processing liquid supplying apparatus, and substrate processing system |
| abstract |
A heater abnormality detecting apparatus is an apparatus for detecting an abnormality of a heater which heats a treatment liquid and which heats a treatment liquid and has a metal heating element and a resin coating covering the periphery of the heating element, A power supply unit for supplying electric power to the heating element to generate heat, a current measuring unit for measuring a current flowing through the heating element, and a controller for controlling the current detected by the current measuring unit And a tear occurrence detecting unit for detecting the occurrence of the tear of the film based on the size of the film. |
| priorityDate |
2015-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |