Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3e58a88f9ff35fdf09b652933421ed50 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-10323 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02403 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate |
2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2017-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95cce5fae5dd5a99ed19b43b802bef9e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18ef28dd9c75c7a33b4524a79ccf9f85 |
publicationDate |
2017-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-101769608-B1 |
titleOfInvention |
Manufacturing method of Electrostatic chuck |
abstract |
In one embodiment of the present invention, at least a part of the aluminum nitride sintered body is composed of aluminum nitride and a composite oxide containing aluminum nitride and at least two kinds of rare earth metals, To 0.2 wt% to 20 wt% based on the total weight of the electrostatic chuck. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020096267-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101965895-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251061-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021521653-A |
priorityDate |
2016-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |